Enhancing the resolution of two-photon microfabrication

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作者
Wei, Xiao-Quan [1 ,4 ]
Li, Yan-Qiu [1 ,2 ]
Gao, Guo-Hua [3 ]
Zhu, Yu [3 ]
Ma, Jing [3 ]
机构
[1] Institute of Electrical Engineering, Chinese Acad. of Sci., Beijing 100190, China
[2] Beijing Institute of Technology, Beijing 100080, China
[3] Department of Precision Instrument and Mechanology, Tsinghua University, Beijing 100084, China
[4] Graduate School, Chinese Acad. of Sci., Beijing 100190, China
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页码:9 / 11
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