Effect of substrate temperature on the structure and optical properties of the Ta2O5 thin film

被引：0
|
作者：
Ma, Ya-Lin [1 ]
Shi, Jian [1 ]
Li, Xu-Cheng [1 ]
Yang, Li-Zhong [1 ]
Deng, Chao-Yong [1 ]
机构：
[1] Department of Electronic Science, School of Science, Guizhou University, Guiyang 550025, China
来源：
Gongneng Cailiao/Journal of Functional Materials | 2013年 / 44卷 / 23期
关键词：
D O I：
10.3969/j.issn.1001-9731.2013.23.010
中图分类号：
学科分类号：
摘要：
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页码：3405 / 3407
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