Effect of substrate bias on the cBN film deposition by magnetron sputtering

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[1] Xu, Feng
[2] Zuo, Dun-Wen
[3] Zhang, Xu-Hui
[4] Hu, Hai-Feng
[5] Wang, Min
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Xu, F. (xufeng@nuaa.edu.cn) | 1600年 / Chinese Ceramic Society, Baiwanzhuang, Beijing, 100831, China卷 / 41期
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