Stereo Bi-Telecentric Phase-Measuring Deflectometry

Replacing the endocentric lenses in traditional Phase-Measuring Deflectometry (PMD) with bi-telecentric lenses can reduce the number of parameters to be optimized during the calibration process, which can effectively increase both measurement precision and efficiency. Consequently, the low distortion characteristics of bi-telecentric PMD contribute to improved measurement accuracy. However, the calibration of the extrinsic parameters of bi-telecentric lenses requires the help of a micro-positioning stage. Using a micro-positioning stage for the calibration of external parameters can result in an excessively cumbersome and time-consuming calibration process. Thus, this study proposes a holistic and flexible calibration solution for which only one flat mirror in three poses is needed. In order to obtain accurate measurement results, the calibration residuals are utilized to construct the inverse distortion map through bicubic Hermite interpolation in order to obtain accurate anchor positioning result. The calibrated stereo bi-telecentric PMD can achieve 3.5 mu m (Peak-to-Valley value) accuracy within 100 mm (Width) x 100 mm (Height) x 200 mm (Depth) domain for various surfaces. This allows the obtaining of reliable measurement results without restricting the placement of the surface under test.