Spatio-temporal modeling for overactuated motion control

被引:0
|
作者
Tacx, Paul [1 ]
van de Vosse, Matthijs [1 ]
Voorhoeve, Robbert [2 ]
Witvoet, Gert [1 ,2 ]
Heertjes, Marcel [1 ,3 ]
Oomen, Tom [1 ,4 ]
机构
[1] Eindhoven Univ Technol, Dept Mech Engn, Eindhoven, Netherlands
[2] TNO, Optomechatron Dept, Delft, Netherlands
[3] ASML, Dev & Engn Mechatron & Measurement Syst, Veldhoven, Netherlands
[4] Delft Univ Technol, Fac Mech Maritime & Mat Engn, Delft, Netherlands
关键词
Spatio-temporal modeling; Motion control; System identification; Precision mechatronics; INFERENTIAL CONTROL; FEEDFORWARD CONTROL; ADAPTIVE OPTICS; WAFER STAGE; LPV CONTROL; IDENTIFICATION; SYSTEMS; DYNAMICS; DESIGN; DOMAIN;
D O I
10.1016/j.mechatronics.2024.103270
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Increasingly stringent performance requirements for motion systems necessitate explicit control of the flexible dynamic behavior. The aim of this paper is to present an approach to identify spatio-temporal models of overactuated mechatronic systems with a limited number of spatially distributed sensors. The proposed approach exploits the modal modeling framework and exploits the symmetry in modal models to enhance the spatial resolution of the identified spatially-sampled modal models. Spatio-temporal models are identified by updating prior finite element method-based models based on the identified extended modal models. The experimental results illustrate the effectiveness of the proposed approach for the identification of complex position-dependent mechanical systems.
引用
收藏
页数:12
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