Effect of temperature and elastic constant on the piezoresistivity of silicon nanobeams

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作者
Zhang, Jia-Hong [1 ]
Huang, Qing-An [1 ]
Yu, Hong [1 ]
Wang, Jing [1 ]
Lei, Shuang-Ying [1 ]
机构
[1] Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China
来源
Journal of Applied Physics | 2009年 / 105卷 / 08期
关键词
Elastic constants;
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