Numerical simulation of plasma in novel plasma reactor for MPCVD diamond film

被引：0
|
作者：
Li, Xiao-Jing [1 ]
Yu, Sheng-Wang [1 ]
Zhang, Si-Kai [1 ]
Tang, Wei-Zhong [1 ]
Lv, Fan-Xiu [1 ]
机构：
[1] College of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China
来源：
Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2010年 / 39卷 / 04期
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Finite difference time domain method
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页码：867 / 871
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