Properties of MTiO3 (M = Sr, Ba) and PbM'O3(M' = Ti, Zr) superlattice thin films fabricated by laser ablation

被引：0

作者：

Department of Chemistry and Institute of Natural Basic Sciences, Wonkwang University, Iksan, Jeonbuk 570-749, Korea, Republic of ^{[1
]}

不详 ^{[2
]}

机构：

来源：

Bull. Korean Chem. Soc. | 2009年 / 1卷 / 201-204期

关键词：

Impedance analyzer - Number of layers - Properties of deposited films - SrTiO3 films - Super-lattice films - Super-lattice structures - Superlattice thin films - X ray diffractometers;

D O I：

10.5012/bkcs.2009.30.1.201

中图分类号：

学科分类号：

摘要：

BaTiO3/SrTiO3 and PbTiO3/PbZrO3 superlattice thin films were fabricated on Pt/Ti/SiO2/Si substrate by the pulsed laser deposition process. The morphologies and physical properties of deposited films were characterized by using X-ray diffractometer, HR-SEM, and Impedance Analyzer. XRD data and SEM images of the films indicate that each layer was well deposited alternatively in the superlattice structure. The dielectric constant of BaTiO3/SrTiO3 superlattice thin film was higher than that of individual BaTiO3 or SrTiO3 film. Same result was obtained in the PbTiO3/PbZrO3 system. The dielectric constant of a superlattice film was getting higher as the number of layer is increased.

引用

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