An overview of ultra-precision diamond machining of microstructured freeform surfaces

被引：9
作者：
机构：
[1] Partner State Key Laboratory of Ultra-Precision Machining Technology, The Hong Kong Polytechnic University, Hong Kong
[2] Guangdong Provincial Key Lab. of Micro/Nano Machining Technology and Equipment, Guangdong University of Technology
来源：
Lee, W. (wb.lee@polyu.edu.hk) | 1600年 / Chinese Mechanical Engineering Society卷 / 49期
关键词：
Cutting mechanism; Machining equipment; Microstructured freeform surface; Precision metrology; Ultra-precision machining;
D O I：
10.3901/JME.2013.19.144
中图分类号：
学科分类号：
摘要：
The development of ultra-precision machining technology, including ultra-precision machining equipment and the single point diamond cutting mechanism, is reviewed and summarized. Micro-engineering technology used in the production of microstructured freeform surfaces is introduced. The ultra-precision diamond cutting process for these microstructured freeform surfaces is elucidated, including single point diamond turning (SPDT), fast tool servo (FTS) machining, diamond micro chiseling (DMC), as well as ultra-precision raster milling. Challenges for measuring microstructured freeform surfaces are discussed, including contact and non-contact measuring methods. Case studies on the fabrication and characterization of some typical microstructured freeform surfaces are presented. Finally, the development of ultra-precision machining equipment in China and the future trends in the machining and measurement of microstructured freeform surfaces are discussed. © 2013 Journal of Mechanical Engineering.
引用
收藏
页码：144 / 155
页数：11
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