Fabrication of 3D metal microstructure based on UV-LIGA and micro-EDM technology

被引：0
|
作者：
Du, Li-Qun [1 ,2 ]
Mo, Shun-Pei [1 ]
Zhang, Yu-Sheng [2 ]
Liu, Chong [1 ,2 ]
机构：
[1] Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China
[2] Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2010年 / 18卷 / 02期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
11
引用
收藏
页码：363 / 368
相关论文
共 50 条
  • [41] Surface Quality Improvement of 3D Microstructures Fabricated by Micro-EDM with a Composite 3D Microelectrode
    Lei, Jianguo
    Jiang, Kai
    Wu, Xiaoyu
    Zhao, Hang
    Xu, Bin
    MICROMACHINES, 2020, 11 (09)
  • [42] High-aspect-ratio WC-Co microstructure produced by the combination of LIGA and micro-EDM
    Takahata, K
    Shibaike, N
    Guckel, H
    MICROSYSTEM TECHNOLOGIES, 2000, 6 (05) : 175 - 178
  • [43] Fabrication of micro-ECM electrode array by combining UV-LIGA with micro electro-discharge machining
    Hu Y.
    Zhu D.
    Li H.
    Zeng Y.
    Ming P.
    Dongnan Daxue Xuebao (Ziran Kexue Ban)/Journal of Southeast University (Natural Science Edition), 2010, 40 (01): : 106 - 110
  • [44] Profile error compensation in high precision 3D micro-EDM milling
    Minh Dang Nguyen
    Wong, Yoke San
    Rahman, Mustafizur
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2013, 37 (02): : 399 - 407
  • [45] Statistical Characteristic and Parameter Characterization of 3D Surface Micro-topography on Micro-EDM
    Ding, Haijuan
    Guo, Libin
    Cui, Hai
    2009 IEEE INTERNATIONAL CONFERENCE ON AUTOMATION AND LOGISTICS ( ICAL 2009), VOLS 1-3, 2009, : 1094 - 1098
  • [46] Elimination of 3D micro-electrode’s step effect and applying it in micro-EDM
    Bin Xu
    Xiao-yu Wu
    Jian-guo Lei
    Hang Zhao
    Xiong Liang
    Rong Cheng
    Deng-ji Guo
    The International Journal of Advanced Manufacturing Technology, 2018, 96 : 429 - 438
  • [47] Elimination of 3D micro-electrode's step effect and applying it in micro-EDM
    Xu, Bin
    Wu, Xiao-yu
    Lei, Jian-guo
    Zhao, Hang
    Liang, Xiong
    Cheng, Rong
    Guo, Deng-ji
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2018, 96 (1-4): : 429 - 438
  • [48] Analytical modeling, fabrication and characterization of a 3-DOF MEMS gyroscope based on UV-LIGA process
    Prakruthi, H. L.
    Saara, K.
    JOURNAL OF OPTICS-INDIA, 2024, 53 (02): : 1068 - 1078
  • [49] Analytical modeling, fabrication and characterization of a 3-DOF MEMS gyroscope based on UV-LIGA process
    H. L. Prakruthi
    K. Saara
    Journal of Optics, 2024, 53 : 1068 - 1078
  • [50] Microelectrode array fabrication by ultrasonic enhanced micro-EDM with reverse copying technology
    Wang, Z. L.
    Zeng, W. L.
    Dong, D. S.
    CURRENT DEVELOPMENT IN ABRASIVE TECHNOLOGY, PROCEEDINGS, 2006, : 372 - +
12345