Anticathode effect on electron kinetics in electron beam generated E x B plasma

被引:0
作者
Chopra, Nirbhav Singh [1 ,2 ]
Romadanov, Ivan [1 ]
Raitses, Yevgeny [1 ]
机构
[1] Princeton Univ, Princeton Plasma Phys Lab, Princeton, NJ 08543 USA
[2] Princeton Univ, Dept Astrophys Sci, Princeton, NJ 08544 USA
关键词
electron beam; anticathode; electron kinetics; plasma-wall interactions; partially magnetized; DIFFUSION; OSCILLATIONS; EXCITATION; TURBULENCE; ARGON;
D O I
10.1088/1361-6595/ad8c7d
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Electron beam (e-beam) generated plasmas with applied crossed electric and magnetic ( ExB) fields are promising for low damage processing of materials with applications to microelectronics and quantum information systems. In cylindrical e-beam ExB plasmas, radial confinement of electrons and ions is achieved by an axial magnetic field and radial electric field, respectively. To control the axial confinement of electrons, such e-beam generated plasma sources may incorporate a conducting boundary known as an anticathode, which is placed on the axially opposite side of the plasma from the cathode. In this work, it is shown that varying the anticathode voltage bias can control the degree to which the anticathode collects or repels incident electrons, allowing control of warm electron (electron energies in 10-30 eV range) and beam electron population confinement. It is suggested that the effect of the anticathode bias on the formation of these distinct electron populations is also associated with the transition between weak turbulence and strong Langmuir turbulence.
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页数:18
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