Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (11 2- 0) textured ZnO films

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作者：
Yanagitani, Takahiko [1 ]
Kiuchi, Masato [1 ]
Matsukawa, Mami [2 ]
Watanabe, Yoshiaki [2 ]
机构：
[1] National Institute of Advanced Industrial Science and Technology, 1-8-31 Midorigaoka, Ikeda, Osaka, 563-8577, Japan
[2] Faculty of Engineering, Doshisha University, 1-3 Tatara-Miyakodani, Kyotanabe-shi, Kyoto, 610-0321, Japan
来源：
Journal of Applied Physics | 2007年 / 102卷 / 02期
关键词：
ZnO film; in which the crystallite c axis lies in the substrate plane [(11 2- 0) textured ZnO; is a good candidate for application in shear mode piezoelectric devices. The relationships between the degree of crystallites alignment and the shear mode electromechanical coupling coefficient k15 in (11 2- 0) textured ZnO films have been investigated. Forty pure-shear mode high overtone bulk acoustic resonators consisting of the (11 2- 0) textured ZnO film were prepared. The film was varied in crystallites alignment and film thickness. The degrees of crystallites alignment of the films were determined by x-ray pole figure analysis. The k15 values of the films were estimated from the conversion loss characteristics of the resonators. A significant correlation was observed between dispersion of the x-ray poles and the k15 values. However; the k15 values in the thinner films were clearly reduced as compared with those in the thicker films despite their similarities in crystallites alignment. In addition; unexpected second harmonic mode resonance was detected in the thinner films. We concluded that the piezoelectrically inactive layer in the initial film growth deteriorated the k15 value in thinner films. © 2007 American Institute of Physics;
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