Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (11 2- 0) textured ZnO films

被引：0
|
作者：
Yanagitani, Takahiko [1 ]
Kiuchi, Masato [1 ]
Matsukawa, Mami [2 ]
Watanabe, Yoshiaki [2 ]
机构：
[1] National Institute of Advanced Industrial Science and Technology, 1-8-31 Midorigaoka, Ikeda, Osaka, 563-8577, Japan
[2] Faculty of Engineering, Doshisha University, 1-3 Tatara-Miyakodani, Kyotanabe-shi, Kyoto, 610-0321, Japan
来源：
Journal of Applied Physics | 2007年 / 102卷 / 02期
关键词：
ZnO film; in which the crystallite c axis lies in the substrate plane [(11 2- 0) textured ZnO; is a good candidate for application in shear mode piezoelectric devices. The relationships between the degree of crystallites alignment and the shear mode electromechanical coupling coefficient k15 in (11 2- 0) textured ZnO films have been investigated. Forty pure-shear mode high overtone bulk acoustic resonators consisting of the (11 2- 0) textured ZnO film were prepared. The film was varied in crystallites alignment and film thickness. The degrees of crystallites alignment of the films were determined by x-ray pole figure analysis. The k15 values of the films were estimated from the conversion loss characteristics of the resonators. A significant correlation was observed between dispersion of the x-ray poles and the k15 values. However; the k15 values in the thinner films were clearly reduced as compared with those in the thicker films despite their similarities in crystallites alignment. In addition; unexpected second harmonic mode resonance was detected in the thinner films. We concluded that the piezoelectrically inactive layer in the initial film growth deteriorated the k15 value in thinner films. © 2007 American Institute of Physics;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 18 条
  • [1] Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (11(2)over-bar0) textured ZnO films
    Yanagitani, Takahiko
    Kiuchi, Masato
    Matsukawa, Mami
    Watanabe, Yoshiaki
    JOURNAL OF APPLIED PHYSICS, 2007, 102 (02)
  • [2] Electromechanical Coupling Coefficient k15 and Crystallites Alignment of (11(2)over-bar0) Textured ZnO Films
    Yanagitani, Takahiko
    Kiuchi, Masato
    Matsukawa, Mami
    Watanabe, Yoshiaki
    2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS, 2006, : 1463 - +
  • [3] Electromechanical coupling coefficient k15 of (11(2)over-bar0) textured ZnO films
    Yanagitani, T
    Mishima, N
    Matsukawa, M
    Watanabe, Y
    2005 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4, 2005, : 1824 - 1827
  • [4] Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane
    Yanagitani, Takahiko
    Mishima, Natsuki
    Matsukawa, Mami
    Watanabe, Yoshiaki
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2007, 54 (04) : 701 - 704
  • [5] Temperature Characteristics of Pure Shear Mode FBARs Consisting of (11(2)over-bar0) Textured ZnO Films
    Yanagitani, Takahiko
    Kiuchi, Masato
    Matsukawa, Mami
    Watanabe, Yoshiaki
    2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS, 2006, : 1459 - +
  • [6] Characteristics of pure-shear mode BAW resonators consisting of (11(2)over-bar0) textured ZnO films
    Yanagitani, Takahiko
    Kiuchi, Masato
    Matsukawa, Mami
    Watanabe, Yoshiaki
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2007, 54 (08) : 1680 - 1686
  • [7] Higher-order shear mode FBAR using polarization-inverted layers of (11(2)over-bar0) textured ZnO films
    Yoshinori, M
    Yanagitani, T
    Matsukawa, M
    Watanabe, Y
    2005 IEEE Ultrasonics Symposium, Vols 1-4, 2005, : 1828 - 1831
  • [8] Quasi-Shear Mode Electromechanical Coupling Coefficient of c-Axis Tilted MgZnO Thin Films
    Shimano, Yohkoh
    Kishi, Hiroki
    Kudo, Shinya
    Yanagitani, Takahiko
    2022 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS), 2022,
  • [9] Pure-shear mode BAW resonator consisting of (11(2)over-bar0) textured AlN films
    Yanagitani, Takahiko
    Kiuch, Masato
    2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX, 2008, : 90 - +
  • [10] Study on Formation Mechanism of (11(2)over-bar0) Textured ZnO Films
    Kawamoto, Takayuki
    Matsukawa, Mami
    Watanabe, Yoshiaki
    Yanagitani, Takahiko
    2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS, 2006, : 1529 - +
12