Experiments on plasma immersion ion implantation inside conducting tubes embedded in an external magnetic field

被引：0

作者：

Pillaca, E.J.D.M. ^{[1
]}

Ueda, M. ^{[1
]}

Reuther, H. ^{[2
]}

Pichon, L. ^{[3
]}

Lepienski, C.M. ^{[4
]}

机构：

[1] Laboratory of Plasma, National Institute for Space Research, S. J. Campos, S. Paulo, Brazil

[2] Institute of Ion Beam Physics and Materials Research, P. O. Box 510109, Dresden,01314, Germany

[3] Institut Pprime-UPR 3346, CNRS-Université de Poitiers-ENSMA, France

[4] Departamento de Física, UFPR, CP 19044, Curitiba, PR,81531-990, Brazil

来源：

关键词：

Compendex;

D O I：

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学科分类号：

摘要：

Ion implantation

引用

页码：1438 / 1443

共 4 条

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