Design of randomly encoded hybrid grating for wavefront testing by quadriwave lateral shearing interferometry

被引：0

作者：

Yue, Xiumei ^{[1
]}

Yang, Yongying ^{[1
]}

Ling, Tong ^{[1
]}

Liu, Dong ^{[1
]}

Luo, Yandong ^{[1
]}

Bai, Jian ^{[1
]}

Shen, Yibing ^{[1
]}

机构：

[1] State Key Laboratory of Modern Optical Instrumentation, Department of Optical Engineering, Zhejiang University, Hangzhou, 310027, Zhejiang

来源：

Zhongguo Jiguang/Chinese Journal of Lasers | 2015年 / 42卷 / 10期

关键词：

Fraunhofer diffraction; Measurement; Quadriwave lateral shearing interferometry; Randomly encoded hybrid grating;

D O I：

10.3788/CJL201542.1008006

中图分类号：

学科分类号：

摘要：

A new type of randomly encoded hybrid grating for wavefront testing by quadriwave lateral shearing interferometry is proposed. The randomly encoded hybrid grating which includes an amplitude encoded grating and a phase chessboard is obtained according to the Fraunhofer diffraction principle and the randomly coding method based on the quantization of radiant flux. Compared with the modified Hartmann mask (MHM), only four diffraction orders exist in its diffraction field, and the quadriwave lateral shearing interferometry is better achieved. System parameters such as the incident beam diameter, grating pitch and the distance from the grating to the imaging plane are analyzed and determined. Comparing the far-field intensity distribution and quadriwave lateral shearing interferograms of the randomly encoded hybrid grating with MHM, results show that only four spots with equal intensity exist in the far-field diffraction of the randomly encoded hybrid grating; the shearing interferogram is stable, and it is capable of detecting arbitrary wavefront aberrations. © 2015, Science Press. All right reserved.

引用

页数：6

共 20 条

[1] Peng A., Ye H., Li X., Effect of aperture distribution on wavefront recovery of lateral shearing interferometer, Acta Optica Sinica, 31, 4, (2011)
[2] Murty M., The use of a single plane parallel plate as a lateral shearing interferometer with a visible gas laser source, Appl Opt, 3, 4, pp. 531-534, (1964)
[3] Liu L., Zeng A., Zhu L., Et al., Lateral shearing interferometer for the wavefront test of small beam, Chinese J Lasers, 41, 1, (2014)
[4] Sugisaki K., Okada M., Otaki K., Et al., EUV wavefront measurement of six-mirror optic using EWMS, SPIE, 6921, (2008)
[5] Chao F., Yang X., A thirteen-step phase restoration algorithm in lateral shearing interferometry, Chinese J Lasers, 41, 5, (2014)
[6] Sun L., Liu D., Ling T., Et al., Mathematical modeling analysis on a small and compact two-dimensional CGLSI interference system, SPIE, 8840, (2013)
[7] Ling T., Liu D., Sun L., Et al., Wavefront retrieval for cross-grating lateral shearing interferometer based on differential Zernike polynomial fitting, SPIE, 8838, (2013)
[8] Ling T., Yang Y., Yue X., Et al., Common-path and compact wavefront diagnosis system based on cross grating lateral shearing interferometer, Appl Opt, 53, 30, pp. 7144-7152, (2014)
[9] Zuo F., Chen L., Xu C., Simultaneous phase-shifting interferometry based on two-dimension grating, Acta Optica Sinica, 27, 4, pp. 663-667, (2007)
[10] Primot J., Guerineau N., Extended Hartmann test based on the pseudoguiding property of a Hartmann mask completed by a phase chessboard, Appl Opt, 39, 31, pp. 5715-5720, (2000)

← 1 2 →