Design and Implementation of Alignment Device for Proximity Lithography System

被引：0
作者：
Luo, Ping [1 ]
Peng, Yunfeng [1 ]
Li, Yuting [1 ]
Liu, Zhiyuan [1 ]
机构：
[1] Chongqing University of Posts and Telecommunications, School of Automation, Chongqing,400065, China
来源：
Proceedings of the 35th Chinese Control and Decision Conference, CCDC 2023 | 2023年
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Least squares approximations - Lithography - Motion control
引用
收藏
页码：4419 / 4424
相关论文
共 50 条
[41]   MOS DEVICE AND PROCESS DESIGN USING COMPUTER-SIMULATIONS [J].
OH, SY .
HEWLETT-PACKARD JOURNAL, 1982, 33 (10) :28-32
[42]   The design and implementation of the Habanero-Java parallel programming language [J].
Department of Computer Science, Rice University, United States .
SPLASH Compil. - Proc. OOPSLA, Onward!, GPCE, DLS, SPLASH Companion, (185-186)
[43]   Design and implementation of educational resources grid portal based on JSF [J].
Department of Educational Technology, Henan Normal University, Xinxiang, China .
Int. Symp. Knowl. Acquis. Model., KAM, 1600, (11-15)
[44]   Design, Implementation, Path Planning, And Control of a Pole Climbing Robot [J].
Universidade de Coimbra .
1600,
[45]   An Intelligent and Informatics e-Health at-Birth Detection and Monitoring System for Children born with Down Syndrome in Rwanda: Design and Implementation [J].
Claude, Habimana Jean ;
Julienne, Murererehe ;
Joselyne, Rugema ;
Speciose, Ingabire ;
Yvonne, Uwamahirwe ;
Joselyne, Nzayisenga ;
Leon, Mutesa ;
Ntambara, Boniface ;
Paul, Niyoyita Jean .
Research Square,
[46]   Built-In Test for Airborne Electronic Systems: Design and Implementation [J].
Ozturk, Engin ;
Dogru, Emre .
AUTOTESTCON (Proceedings), 2023,
[47]   System risk management methods, models and their implementation in telecommunications [J].
Kanev, V.S., 1600, Natsional'nyi Hirnychyi Universytet
[48]   Development and implementation of mobile apps for skier training system [J].
Department of Sports and Well-Being, HanYang University, Ansan ;
15588, Korea, Republic of .
icSPORTS - Proc. Int. Congr. Sport Sci. Res. Technol. Support, (214-221)
[49]   SIMPLE: A STRUCTURED PROGRAMMING LANGUAGE FOR SYSTEM IMPLEMENTATION. [J].
Nagase, Atsuo ;
Kobayashi, Yoshizumi ;
Yasuhara, Ryuichi ;
Nishizawa, Mamoru .
Reports of the Electrical Communication Laboratory, 1979, 27 (7-8) :649-663
[50]   CELL DESIGN SYSTEM. [J].
Franco, D. ;
Reed, L. .
Proceedings - Design Automation Conference, 1981, :240-247
12345