Design and Implementation of Alignment Device for Proximity Lithography System

被引：0
作者：
Luo, Ping [1 ]
Peng, Yunfeng [1 ]
Li, Yuting [1 ]
Liu, Zhiyuan [1 ]
机构：
[1] Chongqing University of Posts and Telecommunications, School of Automation, Chongqing,400065, China
来源：
Proceedings of the 35th Chinese Control and Decision Conference, CCDC 2023 | 2023年
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Least squares approximations - Lithography - Motion control
引用
收藏
页码：4419 / 4424
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