Measurement method of film parameters of metal based on imaging ellipsometry and surface-plasmon resonance

被引：0
|
作者：
Hu, Shiyu [1 ,2 ]
Zeng, Aijun [1 ,2 ]
Gu, Liyuan [1 ,2 ]
Huang, Huijie [1 ,2 ]
Hu, Guohang [1 ,2 ]
He, Hongbo [1 ,2 ]
机构：
[1] Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai
[2] University of Chinese Academy of Sciences, Beijing
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2015年 / 42卷 / 11期
关键词：
Film parameters of metal; Imaging ellipsometry; Measurement; Surface-plasmon resonance;
D O I：
10.3788/CJL201542.1108001
中图分类号：
学科分类号：
摘要：
A measurement method of film parameters of metal based on imaging ellipsometry and surface-plasmon resonance is presented. p polarized light is applied to generate surface-plasmon resonance effect at the interface of metal film and air in layout of imaging ellipsometry. The influence of back light is avoided by s polarized light which can't lead to surface-plasmon resonance effect. Then the normalized reflectance profile along the perpendicular direction of absorption ring of surface-plasmon resonance is obtained. We measure metal film parameters by numerical fitting the reflectance profile along long axis of the elliptical fringe. This method is not necessary to solve the transcendental equation and data processing is simple and fast. The experimental result with this method is coincident with that of standard ellipsometer, which verifies the validity of this measurement method. © 2015, Chinese Laser Press. All right reserved.
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页数：6
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