Design and fabrication of electrothermal nickel microgripper

被引：3

作者：

Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116023, China ^{[1
]}

不详 ^{[2
]}

机构：

[1] Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology

[2] Key Laboratory for Precision and Non-traditional Machining, Dalian University of Technology

来源：

Jixie Gongcheng Xuebao | 2007年 / 5卷 / 116-121期

关键词：

Electroplating; Microgripper; UV-LIGA;

D O I：

10.3901/JME.2007.05.116

中图分类号：

学科分类号：

摘要：

In order to bring about industrialization in micro-electro-mechanical systems (MEMS), the microgripper applied in microoperation and microassembly is developed. It is based on electrothermal principle. V-shaped beam array electrothermal microactuators is adoped to generate displacement for microgriper,and the microgripper is designed by topology optimization. Niclel is selected for fabricating the electrothermal microgripper,and UV-LIGA process is used to fabricate the electrothermal microgripper. The optimized parameters for SU-8 mold are obtained through orthogonal experiment. All factors influenced process are discussed in detail and the resolved methods are given. And an electrothermal nickel microgriper with whole dimension in a millimeter magnitude, depth 30 μm and minimum character size 10 μm. Final dynamic performance of the nickel microgripper is experimented within 0-2.5 V range. The maximum tweezing displacements of up to 67 μm is recorded for this nickel microgripper, and the maximum clamping force can reach 0.8 N. This microgeipper can satisfy microoperation in MEMS.

引用

页码：116 / 121

页数：5

共 7 条

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