Synchrotron X-ray reflectivity studies on nanoporous low dielectric constant organosilicate thin films

被引：0
|
作者：
Oh, Weontae [1 ]
Yeong, Do Park [2 ]
Hwang, Yongtaek [3 ]
Ree, Moonhor [3 ]
机构：
[1] Department of NanoTechnology, Dong-eui University, Busan 614-714, Korea, Republic of
[2] Department of Advanced Materials Engineering, Dong-eui University, Busan 614-714, Korea, Republic of
[3] Department of Chemistry, Center for Integrated Molecular Systems, BK School of Molecular Science, Pohang 790-784, Korea, Republic of
来源：
Bulletin of the Korean Chemical Society | 2007年 / 28卷 / 12期
关键词：
21;
D O I：
10.5012/bkcs.2007.28.12.2481
中图分类号：
学科分类号：
摘要：
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页码：2481 / 2485
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