Thermal deformation compensation of high-energy laser mirrors

被引：11
作者：
Feng Z.-Q. [1 ,2 ]
Bai L. [3 ]
Zhang Z.-B. [4 ]
Lin G.-Y. [5 ]
机构：
[1] College of Physics and Optoelectronic Technology, Dalian University of Technology
[2] School of Science, Dalian Nationalities University
[3] School of Electromechanical and Information Engineering, Dalian Nationalities University
[4] National Key Laboratory of Chemical Lasers, Dalian Institute of Chemical Physics, Chinese Academy of Sciences
[5] State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2010年 / 18卷 / 08期
关键词：
High energy laser; Mirror; Sphere error; Thermal compensation; Thermal deformation;
D O I：
10.3788/OPE.20101808.1781
中图分类号：
学科分类号：
摘要：
A compensation system composed of a PZT, a pressure sensor, an annular force mechanism and a control circuit is developed to compensate the sphere error brought by thermal deformation of a laser mirror. Under the effect of two coaxial annular forces with different radii, the circular mirror produces parabolic deformation in the inner region, which can compensate the sphere error brought by the thermal deformation of the mirror. The finite element method is used to analyze the mirror and the relation among the center displacement with energy absorbance and the force is derived. The experiments of force-deformation and energy absorbance-force-deformation are conducted for a flat mirror with the diameter of 100 mm and the thickness of 8 mm, in which a interferometer is used to monitor the surface deformation. Obtained results show that under different forces, the deformation of effective region always maintains a parabolic shape. Furthermore, the force-deformation curve is obtained, which shows that the centre displacement is over 3 μm under 225 N. Under different energy absorbances, the central displacement of the mirror varies with the force in linearity and the coefficient of force-centre displacement is 0.013 μm/N.
引用
收藏
页码：1781 / 1787
页数：6
相关论文
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