Effect of annealing conditions on properties of sol-gel derived Al-doped ZnO thin films

被引：4

作者：

Key Laboratory for Magnetism and Magnetic Materials of MOE, Lanzhou University, Lanzhou 730000, China ^{[1
]}

机构：

[1] Key Laboratory for Magnetism and Magnetic Materials of MOE, Lanzhou University

来源：

Chin. Phys. Lett. | 2009年 / 8卷

关键词：

Sol-gels;

D O I：

10.1088/0256-307X/26/8/088105

中图分类号：

学科分类号：

摘要：

Transparent conductive Al-doped ZnO (AZO) thin films are prepared on normal glass substrates by the sol-gel spin coating method. The effects of drying conditions, annealing temperature and cooling rate on the structural, electrical and optical properties of AZO films are investigated by x-ray diffraction, scanning electron microscopy, the four-point probe method and UV-VIS spectrophotometry, respectively. The deposited films show a hexagonal wurtzite structure and high preferential c-axis orientation. As the drying temperature increases from 100°C to 300°C the resistivity of AZO films decreases dramatically. In contrast to the annealed films cooled in a furnace and in air, the resistivity of the annealed film which is cooled at -15°C is greatly reduced. Increasing the cooling rate dramatically increases the electrical conductivity of AZO films. © 2009 Chinese Physical Society and IOP Publishing Ltd.

引用

共 16 条

[1]

Gordillo G., Calderon C., Solar Energy Mater. Solar Cells, 69, (2001)

[2]

Zhou Y., Kelly P.J., Postill A., Et al., Thin Solid Films, 447-448, (2004)

[3]

Minami T., Miyata T., Ihara K., Et al., Thin Solid Films, 494, (2006)

[4]

Fu Z., Lin B., Zu J., Thin Solid Films, 402, (2002)

[5]

Lee J.H., Park B.O., Mater. Sci. Eng., 106, (2004)

[6]

Musat V., Teixeira B., Fortunato E., Et al., Thin Solid Films, 502, (2006)

[7]

Mridha S., Basak D., J. Phys., 40, (2007)

[8]

Lin J.P., Wu J.M., Appl. Phys. Lett., 92, (2008)

[9]

Musat V., Teixeira B., Fortunato E., Et al., Surf. Coat. Technol., 180-181, (2004)

[10]

Lee J.H., Ko K.H., Park B.O., J. Cryst. Growth, 247, (2003)

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