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- [17] Influence of substrate movement on the ITO film thickness distribution during magnetron sputtering JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2017, 35 (06):
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- [20] Influence of nitrogen flows on structure and properties of TiAlN film prepared by mid-frequency unbalanced magnetron sputtering Gongneng Cailiao/Journal of Functional Materials, 2013, 44 (01): : 32 - 35