Influence of substrate structure on photoelectricity of copper film prepared by magnetron sputtering

被引:0
|
作者
机构
[1] [1,Meng, Ling-Ling
[2] Wei, Qu-Fu
[3] Huang, Xin-Min
来源
Wei, Q.-F. | 2013年 / Journal of Functional Materials, P.O. Box 1512, Chongqing, 630700, China卷 / 44期
关键词
Photoelectricity - Substrates - Surface morphology - Nanotechnology - Copper - Magnetron sputtering - Weaving;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [11] TiZrNi quasicrystal film prepared by magnetron sputtering
    Huang, He
    Meng, Daqiao
    Lai, Xinchun
    Zhao, Yawen
    Zhou, Ping
    Wang, Qingguo
    Huang, Huogen
    Qiang, Jianbing
    VACUUM, 2015, 122 : 147 - 153
  • [12] Effects of substrate temperature on ZAO thin film prepared by DC magnetron reactive sputtering
    Lu, F.
    Zhou, X. G.
    Xu, C. H.
    Wen, L. S.
    18TH INTERNATIONAL VACUUM CONGRESS (IVC-18), 2012, 32 : 135 - 138
  • [13] Effects of substrate temperature on ZAO thin film prepared by DC reactive magnetron sputtering
    Lu, Feng
    Xu, Chenghai
    MECHATRONIC SYSTEMS AND AUTOMATION SYSTEMS, 2011, 65 : 376 - +
  • [14] Copper nitride thin film prepared by reactive radio-frequency magnetron sputtering
    Yue, GH
    Yan, PX
    Liu, JZ
    Wang, MX
    Li, M
    Yuan, XM
    JOURNAL OF APPLIED PHYSICS, 2005, 98 (10)
  • [15] Copper doping in titanium oxide catalyst film prepared by dc reactive magnetron sputtering
    Zhang, WJ
    Li, Y
    Zhu, SL
    Wang, FH
    CATALYSIS TODAY, 2004, 93-5 : 589 - 594
  • [16] Copper nitride thin film prepared by reactive radio-frequency magnetron sputtering
    Yue, G.H.
    Yan, P.X.
    Liu, J.Z.
    Wang, M.X.
    Li, M.
    Yuan, X.M.
    Journal of Applied Physics, 2005, 98 (10):
  • [17] Influence of substrate movement on the ITO film thickness distribution during magnetron sputtering
    Starkov, Ivan A.
    Nyapshaev, Ilya A.
    Starkov, Alexander S.
    Abolmasov, Sergey N.
    Abramov, Alexey S.
    Levitskii, Vladimir S.
    Terukov, Evgeny I.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2017, 35 (06):
  • [18] Synthesis of monoclinic structure gallium oxide film on sapphire substrate by magnetron sputtering
    孙建旭
    弭伟
    张德双
    杨正春
    张楷亮
    韩叶梅
    袁育杰
    赵金石
    李博
    Optoelectronics Letters, 2017, 13 (04) : 295 - 298
  • [19] Synthesis of monoclinic structure gallium oxide film on sapphire substrate by magnetron sputtering
    Sun J.-X.
    Mi W.
    Zhang D.-S.
    Yang Z.-C.
    Zhang K.-L.
    Han Y.-M.
    Yuan Y.-J.
    Zhao J.-S.
    Li B.
    Mi, Wei (miwei1986@yeah.net), 1600, Springer Verlag (13): : 295 - 298
  • [20] Influence of nitrogen flows on structure and properties of TiAlN film prepared by mid-frequency unbalanced magnetron sputtering
    Wu, Jing-Feng
    He, Nai-Ru
    Qiu, Meng-Ke
    Ji, Li
    Li, Hong-Xuan
    Huang, Xiao-Peng
    Gongneng Cailiao/Journal of Functional Materials, 2013, 44 (01): : 32 - 35