Finite element analysis and experiment on long-travel piezoelectric micro-positioner

被引：0

作者：

State Key Laboratory of Precision Measurement Technology and Instrument, Tianjin University, Tianjin 300072, China ^{[1
]}

不详 ^{[2
]}

机构：

来源：

Tianjin Daxue Xuebao (Ziran Kexue yu Gongcheng Jishu Ban) | 2007年 / 7卷 / 821-826期

关键词：

Actuators - Drives - Electric potential - Finite element method - Loading - Position control - Structure (composition);

D O I：

暂无

中图分类号：

学科分类号：

摘要：

A novel piezoelectric micro-positioner with long-travel and nano-stepping was designed based on the principle of inchworm motion. In structure design, the traditional single frame was updated to double actuators. With the novel principle of push-pull relay movement, the piezoelectric (PZT) actuator realized the great driving force and the long-travel. By using the finite element analysis software, the structure and the static and dynamic characteristic of piezoelectric micro-positioner were investigated. The experiment results show that the moving range of the piezoelectric micro-positioner is 11 mm with good stability, the loading capacity is 24.5 N, and the mini-real step is less than 20 nm.

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