Molecular dynamics simulations of near-surface modification of polystyrene: Bombardment with Ar+ and Ar+ /radical chemistries

被引：0

作者：

Vgh, J.J. ^{[1
]}

Nest, D. ^{[1
]}

Graves, D.B. ^{[1
]}

Bruce, R. ^{[2
]}

Engelmann, S. ^{[2
]}

Kwon, T. ^{[2
,4
]}

Phaneuf, R.J. ^{[2
]}

Oehrlein, G.S. ^{[2
]}

Long, B.K. ^{[3
]}

Willson, C.G. ^{[3
]}

机构：

[1] Department of Chemical Engineering, University of California, Berkeley, CA 94720, United States

[2] Department of Material Science and Engineering, Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD 20742, United States

[3] Department of Chemistry and Biochemistry, University of Texas, Austin, TX 78712, United States

[4] Micron Technology, Boise, ID 83716, United States

来源：

Journal of Applied Physics | 2008年 / 104卷 / 03期

关键词：

49;

D O I：

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摘要：

Journal article (JA)

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