Fabrication and normal/shear stress responses of tactile sensors of polymer/Si cantilevers embedded in PDMS and urethane gel elastomers

被引：11

作者：

Department of Engineering Science, Osaka University, Machikaneyama-cho 1-3, Toyonaka, Osaka 560-8531, Japan ^{[1
]}

不详 ^{[2
]}

不详 ^{[3
]}

机构：

[1] Department of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531

[2] Graduate School of Science and Technology, Kyoto Insitute of Technology, Matsugasaki, Sakyo-Ku

[3] ATR Knowledge Science Labs., Seika, Souraku, Kyoto 619-0288

来源：

IEEJ Trans. Sens. Micromach. | 2008年 / 5卷 / 193-197期

关键词：

Cantilever; Elastomer; Strain gauge; Tactile sensor;

D O I：

10.1541/ieejsmas.128.193

中图分类号：

学科分类号：

摘要：

Cantilever-type tactile sensors of silicon-polymer beam structures were fabricated by surface micromachining and covering with elastomers. Two kinds of elastomers with different Young's modulus PDMS and urethane gel have been used to control deflection of the cantilevers and adjust the sensitivity cantilever-type tactile sensors. The resistance change of the sensor with PDMS has linear dependence on normal and shear stresses, but that of the sensor with urethane gel is nonliner to normal and shear stresses. However, the sensitivity of urethane gel type sensor is about 30 times larger than PDMS type sensor. © 2008 The Institute of Electrical Engineers of Japan.

引用

页码：193 / 197

页数：4