Suggestion of evaluation method for adhesion of DLC films using scratch test and 180 degree bend test

被引：2

作者：

Tech., Inst, of Osaka Pref., Ayamino, Izumi, 594-1157 ^{[1
]}

不详 ^{[2
]}

不详 ^{[3
]}

机构：

来源：

Zairyo | 2007年 / 7卷 / 667-674期

关键词：

180 degree bend test; Adhesion; Diamondlike carbon; Scratch test; Unbalanced magnetron sputtering;

D O I：

10.2472/jsms.56.667

中图分类号：

学科分类号：

摘要：

A new formula to calculate Adhesion energy W of DLC films was suggested on the base of Bull's model using Critical load Lc by scratch test in consideration of compressive residual stress σres in the film. Beside, a new Adhesion parameter / indicating Adhesion energy of the film was derived using fractured area ratio Rb by 180° bend test. Further, with DLC films practically deposited on SUS304 under the various deposition conditions by UBM sputtering, Lc by scratch test, σres by substrate curvature measuring test, Young's modulus EF by nano-indentation test, and Rb by 180° bend test were obtained. Validity of these formula and parameter for Adhesion energy were assessed by evaluating changes in Lc, σres, E F, Rb, W, and J with deposition conditions of the DLC films. Critical load Lc by scratch test changed significantly depending on the changes in mechanical property of EF, and A b by 180° bend test changed with film thickness, were considered to be unreasonable as evaluating of film adhesion. While Adhesion energy W and Adhesion parameter/calculated by the formula suggested in this paper had a proportional relationship regardless of the deposition conditions. Both Wand/were concluded to be derived appropriately for the evaluation of DLC film adhesion. © 2007 The Society of Materials Science,.

引用

页码：667 / 674

页数：7

共 22 条

[1]

Miura K., Demizu K., Nakamura M., UBM Sputter houniyori keiseisita DLC maku Masatsutokusei no Raman G-peak Ichi-izonsei, Dai 113-kai Kouen-taikai Kouenyoshi-shu, pp. 267-268, (2006)

[2]

Akari K., Improvement in Adhesion of DLC Coating, Journal of Japanese Society of Triborogists, 47, 11, pp. 809-814, (2002)

[3]

Nihira N., Mitsuo A., Morikawa K., Improvement in Adhesion for DLC film by using of interface layers, Report of Tokyo Metropolitan Industrial Technology Center, pp. 13-16, (1996)

[4]

Kumagai T., Nishiguchi A., Measurement of Hard Coating Adhesion by Automatic Scratch Tester with Acoustic Emission Detector, The Journal of The Metal Finishing Society of Japan, 37, 9, pp. 575-579, (1986)

[5]

Okada M., Adherence of the Ceramic Films to Metal Substrate, Ceramics, 25, 4, pp. 320-326, (1990)

[6]

Jindal P.C., Quant D.T., Wolfe G.J., Adhesion Measurements of Chemically Vapor Deposited and Physically Vapor Deposited Hard Coatings on WC-Co Substrates, Thin Solid Films, 154, pp. 361-375, (1987)

[7]

Kajioka H., Higuchi K., Takai O., Asamoto K., Kawakami J., Nanbara S., Adhesion of TiN Film Deposition on Stainless Steel by Ion Plating, Bulletin of the Western Hiroshima Prefecture Industrial Research Institute, 37, pp. 49-52, (1994)

[8]

Coating Himaku Mittyakusei Hyoukahou ni kansuru Anketo Chousa Houkokusyo, (1992)

[9]

standard J.S.M.E., Standard Method for Evaluating the Defects in the Coatings Made by Dry Processing JSME S010, pp. 6-10, (1996)

[10]

Steinmann P.A., Hintermann H.E., Adhesion of TiC and Ti (C, N) coatings on steel, J. Vac. Sci. Technol, A, 3, 6, pp. 2394-2400, (1985)

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