Attempts to improve the sensitivity and the energy resolution of an analyzer for Auger photoelectron coincidence spectroscopy and electron ion coincidence spectroscopy

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作者
机构
[1] Arae, Sadanori
[2] Kanemura, Rui
[3] Hiraga, Kenta
[4] Ogashiwa, Yosuke
[5] Yanase, Kohtaro
[6] Kanayama, Noritsugu
[7] Ohno, Shinya
[8] Kakiuchi, Takuhiro
[9] 5,Mase, Kazuhiko
[10] Okudaira, Koji K.
[11] Okusawa, Makoto
[12] Tanaka, Masatoshi
来源
Mase, K. (mase@post.kek.jp) | 1600年 / Vacuum Society of Japan卷 / 56期
基金
日本学术振兴会;
关键词
Inductively coupled plasma - Augers - Ions - Magnetic mirrors - Mirrors - Auger electron spectroscopy - Photoelectrons - Dissociation;
D O I
10.3131/jvsj2.56.507
中图分类号
学科分类号
摘要
We constructed two types of coincidence analyzers those can be used for Auger photoelectron coincidence spectroscopy and electron ion coincidence spectroscopy. The first one is designed for high electron energy resolution measurements, and consists of a double-pass coaxially symmetric mirror electron energy analyzer (DP-ASMA), a double-pass cylindrical mirror electron energy analyzer (DP-CMA), a time-of-flight ion mass spectrometer (TOF-MS), a magnetic shield, a conflat flange, an xyz stage, and a tilt adjustment mechanism. The second one is dedicated for high sensitivity measurements, and involves an ASMA with a large pinhole, DP-CMA with a large pinhole, and a TOF-MS.
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