Optical properties of SiO2 and ZrO2 films investigated by spectroscopic ellipsometry

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作者：
Wang, Bi-Yi
Yuan, Xiao-Dong
Jiang, Xiao-Dong
Zu, Xiao-Tao
Guo, Yuan-Jun
Zheng, Wan-Guo
机构：
[1] Research Center of Laser Fusion, CAEP, Mianyang 621900, China
[2] School of Physics and Electron, University of Electronic Science and Technology of China, Chengdu 610054, China
来源：
Yadian Yu Shengguang/Piezoelectrics and Acoustooptics | 2008年 / 30卷 / 06期
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页码：747 / 750
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