Analysis of forces for micromanipulations in dry and liquid media

被引：64

作者：

Laboratoire d'Automatique de Besançon, CNRS-ENSMM-UFC, 24, rue Alain Savary, 25000 Besançon, France ^{[1
]}

不详 ^{[2
]}

机构：

[1] Laboratoire d'Automatique de Besançon, CNRS-ENSMM-UFC, 25000 Besançon, 24, rue Alain Savary

[2] Laboratoire de Robotique de Paris, CNRS-UPMC, 92265 Fontenay Aux Roses

来源：

J. Micromechatron. | 2006年 / 3卷 / 389-413期

关键词：

Capillary force; Electrostatic force; Hydrodynamic effect; Liquid medium; Micromanipulation; Microrobotics; Pull-offforce; Vander Waals force;

D O I：

10.1163/156856306777924699

中图分类号：

学科分类号：

摘要：

During microscale object manipulation, contact (pull-off) forces and non-contact (capillary, van der Waals and electrostatic) forces determine the behaviour of the micro-objects rather than the inertial forces. The aim of this article is to give an experimental analysis of the physical phenomena at a microscopic scale in dry and liquid media. This article introduces a review of the major differences between dry and submerged micromanipulations. The theoretical influences of the medium on van der Waals forces, electrostatic forces, pull-off forces and hydrodynamic forces are presented. Experimental force measurements based on an AFM system are carried out. These experiments exhibit a correlation better than 40% between the theoretical forces and the measured forces (except for pull-off in water). Finally, some comparative experimental micromanipulation results are described and show the advantages of the liquid medium. © VSP 2006.

引用

页码：389 / 413

页数：24

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