Non-contact microcantilever stiffness calibration method based on electrostatic force

被引：0
作者：
Zhang, Shiyu [1 ]
Zhao, Lingzhe [1 ]
Yu, Meike [1 ]
Zhao, Meirong [1 ]
Zheng, Yelong [1 ]
机构：
[1] School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin
来源：
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2024年 / 45卷 / 06期
关键词：
electrostatic force; microcantilever; stiffness calibration; uncertainty;
D O I：
10.19650/j.cnki.cjsi.J2412615
中图分类号：
学科分类号：
摘要：
The calibration of the stiffness of microcantilever is of great significance in industrial and academic research. The traditional calibration method for microcantilever has drawbacks such as adhesive friction and contact wear. In order to effectively solve the problem of contact friction in traditional stiffness calibration, this paper proposes a non-contact microcantilever stiffness calibration method based on electrostatic force. This method applied static electricity as a standard load to the end of a microcantilever and calculated the stiffness of the microcantilever based on Hooke′ s law. Numerical simulations of a parallel plate structure showed that when there is a small deviation in the relative position between the microcantilever and the reference electrode, the electrostatic force deviation is less than 5% . The results of the electrostatic force calibration experiment showed that the stiffness of the microcantilever was 0. 344 N / m, with a relative measurement uncertainty of 1. 86% . This method is suitable for stiffness calibration of microcantilever and holds significant implications for the research field of micro-force measurements. © 2024 Science Press. All rights reserved.
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页码：256 / 265
页数：9
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