Laser absorption spectroscopy for detection of hydrogen fluoride using tunable diode laser

被引：0

作者：

Gao, Yan-Wei ^{[1
]}

Zhang, Yu-Jun ^{[1
]}

Chen, Dong ^{[2
]}

He, Ying ^{[1
]}

You, Kun ^{[1
]}

Xu, Jin-Feng ^{[1
]}

Liu, Wen-Qing ^{[1
]}

机构：

[1] Key Laboratory of Environmental Optics and Technology, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei

[2] School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei

来源：

Guangzi Xuebao/Acta Photonica Sinica | 2015年 / 44卷 / 06期

关键词：

Absorption; Distributed feedback laser; Gas measurement; Hydrogen fluoride; Online monitoring; Tunable diode laser absorption spectroscopy; Voigt profile;

D O I：

10.3788/gzxb20154406.0630003

中图分类号：

学科分类号：

摘要：

Temperature and current tuning characteristics of distributed feedback laser and absorption lines distribution of HF gas in near infrared was investigated, generalized Lorentz functions was used to realize rapid approximate calculation of Voigt function. The Voigt profile fitting of absorbance and the inversion of gas concentration for wavelength scanning technology. A tunable diode laser absorption spectroscopy system for HF gas concentration measurement was designed, using one absorption line of HF gas near 1.28 μm as the target absorption line, using known standard concentration HF gas for preparation of different concentration HF gas to measurement. The detection limit is 1.12 ppm-m. The system has high measurement accuracy and long-term operate stability, satisfies the needs of HF gas real-time online monitoring. ©, 2015, Chinese Optical Society. All right reserved.

引用

页数：6