Synthesis and characterization of cubic boron nitride thin films

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作者：
机构：
[1] Wang, Ming'e
[2] 1,Ma, Guojia
[3] Dong, Chuang
来源：
Wang, Ming'e | 1600年 / Science Press卷 / 34期
关键词：
X ray photoelectron spectroscopy;
D O I：
10.13922/j.cnki.cjovst.2014.09.13
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