Dielectric breakdown phenomena during secondary electron emission measurement of sputter-deposited MgO films

被引：0
|
作者：
Nakano, Takeo [1 ]
Fujimoto, Takashi [1 ,2 ]
Nakada, Daisuke [1 ]
Baba, Shigeru [1 ]
机构：
[1] Department of Materials and Life Science, Seikei University, Musashino, Tokyo 180-8633, Japan
[2] Musashi. Engineering, Inc., 8-7-4, Shimorenjaku, Mitaka, Tokyo 181-0013, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2006年 / 45卷 / 10 A期
关键词：
Magnesia;
D O I：
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中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
页码：7875 / 7878
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