Design of online measuring device for surface profile of Wolter Type I mirror

被引：1
|
作者：
Cui T.-G. [1 ,2 ]
Wang Y.-G. [1 ,2 ]
Ma D.-M. [1 ]
Ma W.-S. [1 ]
Chen B. [1 ]
机构：
[1] Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
[2] Graduate University of Chinese Academy of Sciences
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2010年 / 18卷 / 08期
关键词：
Long trace profiler; Sequential scanning; Slope measurement; Wolter type I mirror;
D O I：
10.3788/OPE.20101808.1801
中图分类号：
学科分类号：
摘要：
As traditional interference-based measurements can not be suited to measure the surface profile of the Wolter Type I revolving aspheric mirror, a new method was proposed to measure this kind of mirror in this paper. On the basis of a Long Trace Profiler (LTP), a new measuring device was also established by introducing a pentaprism into the scanning mechanism for ray turning. The working principles, structure parameters and data processing algorithms of the device were investigated, then a standard plane mirror was used as the reference to calibrate the device. Finally, a mirror sample was measured to verify the measuring device. Experimental results indicate that designed device can achieve the slope error of RMS 6.7 μrad, repeatability of 0.75 μrad and the height profiles of PV 0.24λ and RMS 0.07λ, which meets the design requirements basically.
引用
收藏
页码：1801 / 1806
页数：5
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