Passive micro-valve based on SU-8

被引：0
|
作者：
Zhang, Cong-Chun [1 ]
Guo, Tai [1 ]
Ding, Gui-Fu [1 ]
机构：
[1] Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2013年 / 21卷 / 04期
关键词：
D O I：
10.3788/OPE.20132104.1011
中图分类号：
学科分类号：
摘要：
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页码：1011 / 1016
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