Ultra precision diamond shaping of an elliptical micro-lens array

被引：0
作者：
Department of Mechanical and Electro-Mechanical Engineering, Tam-Kang University, No.151 Ying-Chuan Roa, Tamsui, Taipei Hsien, 251, Taiwan [1 ]
机构：
[1] Department of Mechanical and Electro-Mechanical Engineering, Tam-Kang University, Tamsui, Taipei Hsien, 251
来源：
Key Eng Mat | 2009年 / 380-383期
关键词：
Elliptical; Micro-lens array; Single point diamond shaping;
D O I：
10.4028/www.scientific.net/KEM.407-408.380
中图分类号：
学科分类号：
摘要：
Micro lens array is widely used in photonics and telecommunication products, including back-light module of flat panel display devices and white-light LED illumination. The ultra precision diamond shaping method together with tool servo technique was studied and developed in this research to generate elliptical micro lens array. Each elliptical micro lens has radii in X and Y direction of 1.0 mm and 1.5 mm respectively. A high filling-factor (100 %) elliptical micro lens array with form accuracy better than 0.15μm and surface roughness around 5nm Ra was successfully fabricated. © (2009) Trans Tech Publications, Switzerland.
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页码：380 / 383
页数：3
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