Digital holographic interferometry of microspacing objects with the scattering surface

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Dikov, O.V. [1 ]
Savonin, S.A. [1 ]
Kachula, V.I. [1 ]
Ryabukho, V.P. [1 ,2 ]
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[1] Saratov State University, N. G. Chernyshevsky, Russia
[2] Institute of Precision Mechanics and Control of the Russian Academy of Sciences, Russia
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页码:51 / 64
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