Phase composition of sputter deposited tungsten thin films

被引:1
作者
Farahani, F. Ahangarani [1 ]
Depla, D. [1 ]
机构
[1] Univ Ghent, Dept Solid State Sci, Krijgslaan 281 (S1), B-9000 Ghent, Belgium
关键词
Magnetron sputter deposition; Phase composition; Tungsten; Deposition parameters; METASTABLE BETA-W; NANOCRYSTALLINE TUNGSTEN; ELECTRICAL-RESISTIVITY; GRAIN-BOUNDARIES; ALPHA-W; MICROSTRUCTURE; TRANSFORMATION; STRESSES; GROWTH; SUPERCONDUCTIVITY;
D O I
10.1016/j.surfcoat.2024.131447
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Sputter deposited tungsten thin films are studied by X-ray diffraction. Two phases can be identified: a-W and /i-W based on the observed (110), and (200) and (210) Bragg reflections, respectively. With increasing film thickness (50 to 200 nm), the phase composition shifts from /i-W towards a-W. No influence of the base pressure (3 x 10-3-3 -3 -3 x 10-5 -5 Pa) on the phase composition is observed. Also the influence of the argon pressure (0.3 to 0.7 Pa) is rather weak. The strongest shift towards a-W composed thin films is obtained by increasing the discharge power (50 to 250 W). This trend is further studied by energy flux measurements using a calorimetric probe. These measurements rule out a strong change of the substrate temperature, and an impact of the energy flux scaled by the deposition rate (total energy per deposited atom). Test particle Monte Carlo simulations reveal the importance of the momentum of the reflected argon neutrals on the phase composition. The maximum energy of these species is mainly defined by the discharge voltage, and is higher than the directional dependent displacement energy of W. Despite the significant correlation between phase composition and the number of displacement per deposited atom, there is a strong scatter of the phase composition. As the deposition conditions were varied in random way, changes of the target erosion profile, and the changing discharge voltage over each series are probably partially responsible for the observed scatter. This scatter is also enhanced by the long term changes in the phase composition towards the more thermodynamic stable a-W phase.
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页数:10
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共 95 条
[1]   Effects of Substrate Bias and Ar Pressure on Growth of α-phase in W Thin Films Deposited by RF Magnetron Sputtering [J].
Ahn, Seon Mi ;
Jang, Gil Su ;
Kim, Du Yun ;
Hwang, Nong-Moon .
ELECTRONIC MATERIALS LETTERS, 2023, 19 (03) :298-308
[2]   TUNGSTEN FILMS WITH THE A15 STRUCTURE [J].
ARITA, M ;
NISHIDA, I .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (04) :1759-1764
[3]   Evaluation of the threshold displacement energy in tungsten by molecular dynamics calculations [J].
Banisalman, Mosab Jaser ;
Park, Sehyeok ;
Oda, Takuji .
JOURNAL OF NUCLEAR MATERIALS, 2017, 495 :277-284
[4]   Structural and Optical Properties of Thin Film β-Ta upon Exposure to Hydrogen to Asses Its Applicability as Hydrogen Sensing Material [J].
Bannenberg, Lars J. ;
Verhoeff, Daan J. ;
Jonckers Newton, Nick ;
Thijs, Michel ;
Schreuders, Herman .
ACS APPLIED NANO MATERIALS, 2024, 7 (02) :1757-1766
[5]   Impact of deposition rate, underlayers, and substrates on β-tungsten formation in sputter deposited films [J].
Barmak, Katayun ;
Liu, Jiaxing .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2017, 35 (06)
[6]   Transformation of topologically close-packed β-W to body-centered cubic α-W: Comparison of experiments and computations [J].
Barmak, Katayun ;
Liu, Jiaxing ;
Harlan, Liam ;
Xiao, Penghao ;
Duncan, Juliana ;
Henkelman, Graeme .
JOURNAL OF CHEMICAL PHYSICS, 2017, 147 (15)
[7]   SUPERCONDUCTIVITY IN BETA-TUNGSTEN FILMS [J].
BASAVAIAH, S ;
POLLACK, SR .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (12) :5548-+
[8]   Modelling the primary damage in Fe and W: Influence of the short range interactions on the cascade properties: Part 1-Energy transfer [J].
Becquart, Charlotte S. ;
De Backer, Andree ;
Olsson, Par ;
Domain, Christophe .
JOURNAL OF NUCLEAR MATERIALS, 2021, 547
[9]   DC magnetron sputtered tungsten: W film properties and electrical properties of W/Si Schottky diodes [J].
Bouziane, K ;
Mamor, M ;
Meyer, F .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 81 (01) :209-215
[10]   The influence of target surface morphology on the deposition flux during direct-current magnetron sputtering [J].
Boydens, F. ;
Leroy, W. P. ;
Persoons, R. ;
Depla, D. .
THIN SOLID FILMS, 2013, 531 :32-41