The GPU-based parallel processing algorithm for fast inspection of semiconductor wafers

被引：0
作者：
Park, Youngdae [1 ]
Kim, Joon Seek [1 ]
Joo, Hyonam [2 ]
机构：
[1] Dept. of Electronics Engineering, Hoseo University
[2] Dept. of Digital Display Engineering, Hoseo University
来源：
Journal of Institute of Control, Robotics and Systems | 2013年 / 19卷 / 12期
关键词：
CUDA; GPU; Machine vision; Parallel processing; Wafer inspection;
D O I：
10.5302/J.ICROS.2013.13.9037
中图分类号：
学科分类号：
摘要：
In a the present day, many vision inspection techniques are used in productive industrial areas. In particular, in the semiconductor industry the vision inspection system for wafers is a very important system. Also, inspection techniques for semiconductor wafer production are required to ensure high precision and fast inspection. In order to achieve these objectives, parallel processing of the inspection algorithm is essentially needed. In this paper, we propose the GPU (Graphical Processing Unit)-based parallel processing algorithm for the fast inspection of semiconductor wafers. The proposed algorithm is implemented on GPU boards made by NVIDIA Company. The defect detection performance of the proposed algorithm implemented on the GPU is the same as if by a single CPU, but the execution time of the proposed method is about 210 times faster than the one with a single CPU. © ICROS 2013.
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收藏
页码：1072 / 1080
页数：8
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