Analysis of dielectric function of silicon films with spectroscopic ellipsometry

被引：0
|
作者：
Dept. of Optoelectronics, Chengdu University of Information Technology, Chengdu 610225, China [1 ]
机构：
来源：
Bandaoti Guangdian | 2008年 / 2卷 / 226-230期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Spectroscopic ellipsometry (SE), a common method for films optic parameter test, owns several advantages, such as good sensitivity, excellent precision and scatheless to the samples. Firstly, the theory model of effective medium approximation(EMA) is introduced, then a computer theory fitting between EMA model and the SE measure results is operated. It indicates that the calculated results are consistent with the SE data perfectly when we assume the silicon film as a mixture of amorphous, polycrystalline and voids, and then the microstructure information of samples is obtained.
引用
收藏
相关论文
共 50 条
  • [1] Complex dielectric function of biaxial tensile strained silicon by spectroscopic ellipsometry
    Vineis, CJ
    PHYSICAL REVIEW B, 2005, 71 (24):
  • [2] DIELECTRIC FUNCTION OF THIN POLYPYRROLE AND PRUSSIAN BLUE FILMS BY SPECTROSCOPIC ELLIPSOMETRY
    ARWIN, H
    ASPNES, DE
    BJORKLUND, R
    LUNDSTROM, I
    SYNTHETIC METALS, 1983, 6 (04) : 309 - 316
  • [3] Complex dielectric function of thiazolothiazole thin films determined by spectroscopic ellipsometry
    Shuchi, Nuren
    Mower, Jackson
    Stinson, V. Paige
    Mclamb, Micheal J.
    Boreman, Glenn D.
    Walter, Micheal G.
    Hofmann, Tino
    OPTICAL MATERIALS EXPRESS, 2023, 13 (06) : 1589 - 1595
  • [4] Thin films with high surface roughness: thickness and dielectric function analysis using spectroscopic ellipsometry
    Lehmann, Daniel
    Seidel, Falko
    Zahn, Dietrich R. T.
    SPRINGERPLUS, 2014, 3 : 1 - 8
  • [5] Spectroscopic ellipsometry on silicon-oxide films on silicon
    Jungk, G
    Grabolla, T
    THIN SOLID FILMS, 1998, 335 (1-2) : 253 - 257
  • [6] Characterization of inhomogeneous dielectric films by spectroscopic ellipsometry
    Rivory, J
    THIN SOLID FILMS, 1998, 313 : 333 - 340
  • [7] Complex dielectric function of CdTe/GaAs thin films studied by spectroscopic ellipsometry
    Jeen, Gwangsoo
    Jo, Jaehyuk
    Park, Hyoyeol
    JOURNAL OF THE KOREAN CRYSTAL GROWTH AND CRYSTAL TECHNOLOGY, 2005, 15 (04): : 157 - 161
  • [8] UNAMBIGUOUS DETERMINATION OF THICKNESS AND DIELECTRIC FUNCTION OF THIN-FILMS BY SPECTROSCOPIC ELLIPSOMETRY
    ARWIN, H
    ASPNES, DE
    THIN SOLID FILMS, 1984, 113 (02) : 101 - 113
  • [9] Infrared Dielectric Functions of Hydrogenated Amorphous Silicon Thin Films Determined by Spectroscopic Ellipsometry
    Saint John, David B.
    Shen, Haoting
    Shin, Hang-Beum
    Jackson, Thomas N.
    Podraza, Nikolas J.
    2012 38TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2012, : 3112 - 3117
  • [10] Study of the dielectric function of ZnS by spectroscopic ellipsometry
    Ghong, TH
    Kim, TJ
    Kim, YD
    Kim, SJ
    Aspnes, DE
    Choi, YD
    Yu, YM
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2003, 42 : S238 - S241
12345