Fabrication of piezoelectric bimorph using lead zirconate titanate thin film deposited by hydrothermal method

被引：0

作者：

Key Laboratory for Precision and Non-Traditional Machining Technology, Dalian University of Technology, Dalian 116023, China ^{[1
]}

不详 ^{[2
]}

不详 ^{[3
]}

机构：

[1] Key Laboratory for Precision and Non-Traditional Machining Technology, Dalian University of Technology

[2] School of Electronic and Information Engineering, Dalian University of Technology

[3] Key Laboratory for Micro/Nano Technology and System, Dalian University of Technology

来源：

Chin J Mech Eng Engl Ed | 2007年 / 6卷 / 5-8期

关键词：

Hydrothermal method; Lead zirconate titanate (LZT) film; Piezoelectric bimorph;

D O I：

10.3901/CJME.2007.06.005

中图分类号：

学科分类号：

摘要：

In order to describe the characteristics of piezoelectric bimorph, properties of lead zirconate titanate (LZT) film are studied by X-ray diffraction (XRD) and scanning electron microscope (SEM). The ratio of PbTiO3/PbZrO3 in LZT is 53/47, which is around morphotropic phase boundary (MPB). LZT film is composed of cubic particles with the average size of 5μm. Density of thin film is figured out through the datum measured in experiments. The displacement model used to analyze the driving ability of bimorph is set up, and the effect of elastic intermediate layer is taken into account. Piezoelectric coefficient of LZT film is worked out by using the displacement model. Experiments of driving ability show that deformation of bimorph free end does not increase with times of crystal growth processes and the maximum deformation is obtained after two times crystal growth processes. Finally, the ferroelectric property of the bimorph is investigated and coercive voltage of the bimorph is obtained.

引用

页码：5 / 8

页数：3

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