Fabrication of submicron IrO2 nanowire array biosensor platform by conventional complementary metal-oxide-semiconductor process

被引：0
|
作者：
Zhang, Fengyan [1 ]
Ulrich, Bruce [1 ]
Reddy, Ravi K. [2 ]
Venkatraman, Vinu L. [2 ]
Prasad, Shalini [2 ]
Vu, Tania Q. [3 ]
Hsu, Sheng-Teng [1 ]
机构：
[1] Sharp Laboratories of America, Inc., 5700 NW Pacific Rim Blvd., Camas, WA 98607, United States
[2] Department of Electrical and Computer Engineering, Portland State University, 1900 SW 4th Ave., Portland, OR 97201, United States
[3] Department of Biomedical Engineering, Oregon Health and Science University, 3303 SW Bond Ave., 13B, Portland, OR 97239, United States
来源：
Japanese Journal of Applied Physics | 2008年 / 47卷 / 2 PART 1期
关键词：
Nanowires;
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摘要：
Journal article (JA)
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页码：1147 / 1151
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