Compensating impurity in high purity silicon single crystal investigated by photo-thermal ionization spectroscopy

被引：0

作者：

Yu, Chen-Hui

Zhang, Bo

Yu, Li-Bo

Li, Ya-Jun

Lu, Wei

Shen, Xue-Chu

机构：

[1] National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

[2] Southwest Institute of Technical Physics, Department of Photo Devices, Chengdu 610041, China

来源：

Wuli Xuebao/Acta Physica Sinica | 2008年 / 57卷 / 02期

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页码：1102 / 1108