Preparation of polycrystalline silicon films by aluminum-induced crystallization at low temperature

被引：0
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作者：
Xia, Dong-Lin [1 ]
Yang, Sheng [1 ]
Xu, Man [1 ]
Zhao, Xiu-Jian [1 ]
机构：
[1] Key Laboratory of Silicate Materials Science and Engineering, Wuhan University of Technology, Wuhan 430074, China
来源：
Ganguang Kexue yu Guanghuaxue/Photographic Science and Photochemistry | 2006年 / 24卷 / 02期
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页码：87 / 92
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