Positioning, structuring and controlling with nNanoprecision

被引：0

作者：

Hedderich R. ^{[1
,2
]}

Heiler T. ^{[2
,3
]}

Gröger R. ^{[2
,3
]}

Schimmel T. ^{[2
,3
]}

Walheim S. ^{[2
,3
]}

机构：

[1] Network NanoMat, Karlsruhe Institute of Technology (KIT), Northern Campus

[2] Institute of Nanotechnology, Forschungszentrum Karlsruhe, Karlsruhe Institute of Technology (KIT), 76344 Eggenstein Leopoldshafen, Northern Campus

[3] Center for Functional Nanostructures (CFN), Karlsruhe Institute of Technology (KIT), Universität Karlsruhe, 76131 Karlsruhe, Southern Campus

来源：

IFIP Advances in Information and Communication Technology | 2010年 / 315卷

关键词：

AFM; Lithography; Nanotechnology; Polymer blends;

D O I：

10.1007/978-3-642-11598-1_26

中图分类号：

学科分类号：

摘要：

Key industries such as the automotive, electronic, medical and laboratory technical industries have continually rising demands for precise manufacturing, handling and control techniques. This is true for the manufacture of injection nozzles for engines as indeed also for the irradiation of extremely fine wafer structures and in the field of scanning probe microscopy. Some examples from research and their industrial application which have been made available by NanoMat Network Partners will be highlighted in this presentation. For example the spontaneous structure formation at the nanoscale and the application as anti-reflection layers. © 2010 Springer Berlin Heidelberg.

引用

页码：222 / 226

页数：4

共 7 条

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[7]

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