Study on patterned sapphire substrate by wet etching

被引：0
|
作者：
Shao, Hui-Hui [1 ,2 ]
Li, Shu-Qiang [1 ,2 ]
Qu, Shuang [1 ,2 ]
Li, Yu-Feng [2 ]
Wang, Cheng-Xin [2 ]
Xu, Xian-Gang [1 ,2 ]
机构：
[1] State Key laboratory of Crystal Material, Shandong University, Jinan 250100, China
[2] Shandong Huaguang Optoelectronics Co, LTD., Jinan 250101, China
来源：
Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2010年 / 39卷 / 06期
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页码：1443 / 1445
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