Sensitivity of electroplating conditions on Young's modulus of thin film

被引：0
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作者：
Kim, Sang-Hyun [1 ]
Kang, Sang Wook [1 ]
机构：
[1] Mechanical Systems Engineering, Hansung University, 389 Samseon-dong, Seongbuk-gu, Seoul 136-792, Korea, Republic of
来源：
Japanese Journal of Applied Physics | 2008年 / 47卷 / 9 PART 1期
关键词：
14;
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摘要：
Journal article (JA)
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页码：7314 / 7316
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