Highly Selective and Extensive Range Room Temperature Hydrogen Gas Sensor Based on Pd-Mg Alloy Thin Films

被引：2

作者：

Gautam, Durvesh ^{[1
]}

Gautam, Yogendra K. ^{[1
]}

Kumar, Ashwani ^{[2
]}

Vikal, Sagar ^{[1
]}

Sanger, Amit ^{[3
]}

Malik, Anil K. ^{[1
]}

Pal Singh, Beer ^{[1
]}

机构：

[1] Chaudhary Charan Singh Univ, Dept Phys, Smart Mat & Sensor Lab, Meerut 250004, India

[2] Reg Inst Educ NCERT, Dept Phys, Bhubaneswar 751022, India

[3] Netaji Subhas Univ Technol, Dept Phys, New Delhi 110078, India

来源：

IEEE SENSORS JOURNAL | 2024年 / 24卷 / 24期

关键词：

Sensors; Metals; Hydrogen; Gas detectors; Sputtering; Surface treatment; Temperature sensors; Surface topography; Temperature measurement; Surface roughness; Gas sensor; hydrogen; magnesium; palladium; selectivity; X-ray photoelectron spectroscopy (XPS); PALLADIUM; STORAGE; SEMICONDUCTOR;

D O I：

10.1109/JSEN.2024.3491793

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this study, MgPd alloy thin films were deposited on a glass substrate using dc/RF magnetron sputtering technique with varying sputtering power (30-60 W) of Pd target to achieve different compositions of alloy. X-ray diffractometry (XRD) and X-ray photoelectron spectroscopy (XPS) analyses provide the crystalline structure and elemental composition of the MgPd alloy thin films, respectively. The surface morphology study through field emission scanning electron microscopy (FE-SEM) reveals nanoflakes. Gas sensing study reveals that the sensitivity of the Mg65Pd35 alloy thin film sensor is 3.41% for 500 ppm and 13% for 1 bar of hydrogen (H2) at room temperature (RT). The response/recovery times of the sensor are 5 s/3 min and 85 s/6 min for 1 bar H-2 gas and 500 ppm H-2, respectively. A remarkable selectivity toward the H-2 gas is observed in comparison to other gases such as CO, NO2, and NH3. Long-term stability was observed even with increased Pd composition over multiple hydrogenation/dehydrogenation cycles. These findings suggest that Pd-capped MgPd alloy thin films are promising for the applications of highly durable, selective, cost-effective, and room-temperature hydrogen gas sensors.

引用

页码：40423 / 40430

页数：8