Nonlinear dynamics of lateral micro-resonator including viscous air damping

被引：0

作者：

Gao, Rong ^{[1
]}

Wang, Xiaojing ^{[1
]}

Wang, Min ^{[2
]}

Yu, Maohua ^{[1
]}

Xie, Mingchun ^{[1
]}

机构：

[1] School of Mechanical Electronic Engineering and Automation, Shanghai University

[2] No.802 Institute, Shanghai Academy of Spaceflight Technology

来源：

Chinese Journal of Mechanical Engineering (English Edition) | 2007年 / 20卷 / 03期

关键词：

Air damping; Micro-electro-mechanical systems (MEMS); Micro-resonator; Nonlinear dynamics;

D O I：

10.3901/CJME.2007.03.075

中图分类号：

学科分类号：

摘要：

The nonlinear dynamics of the lateral micro-resonator including the air damping effect is researched. The air damping force is varied periodically during the resonator oscillating, and the air damp coefficient can not be fixed as a constant. Therefore the linear dynamic analysis which used the constant air damping coefficient can not describe the actual dynamic characteristics of the micro-resonator. The nonlinear dynamic model including the air damping force is established. On the base of Navier-Stokes equation and nonlinear dynamical equation, a coupled fluid-solid numerical simulation method is developed and demonstrates that damping force is a vital factor in micro-comb structures. Compared with existing experimental result, the nonlinear numerical value has quite good agreement with it. The differences of the amplitudes (peak) between the experimental data and the results by the linear model and the nonlinear model are 74.5% and 6% respectively. Nonlinear numerical value is more exact than linear value and the method can be applied in other micro-electro-mechanical systems (MEMS) structures to simulate the dynamic performance.

引用

页码：75 / 78

页数：3